Panel final inspection for advanced IC Substrates and ultra fine line HDI with min line/space down to 7 µm.

Galaxy Fi 7Cχ, CIMS latest panel based final inspection system, is designed to support final inspection of advanced IC Substrates and ultra fine line HDI. It is equipped with color camera and capable to scan down to 7 µm line/space width technology.

The system’s state of the art optical technology for final inspection is designed to achieve maximum contrast on panels covered by solder mask resist and produced with various metal finishing processes. This technology supports high resolution image acquisition and ensures reliable detection of defects on plated copper, gold plated or OTC, solder mask and bare laminate.

Equipped with the state-of-the-art image acquisition and advanced software capabilities, the Galaxy product family is renowned for its exceptional detection achieved with lowest possible false calls rate.

Galaxy Fi 7Cχ is powered by Spark™ 3.0 – an innovative cross-platform detection engine.


  • Linear motors for smooth & silent motion
  • Robust mechanical structure
  • Automated vacuum table
  • High performance image processing firmware
  • Next generation computer to process large data
  • Fast and intuitive setup for new jobs
  • Compatible with front/back AMHS automation or robot


  • +2DM™ metrology – panel dimensions measurement
  • +2CD™ metrology – 2D measurement of circuit elements
  • +3DH™ metrology – 3D measurements of circuit element’s height
  • +3DP™ metrology – 3D profiling of circuit element
  • CDB™/CDBIC™ – defects classification and virtual defects mapping
  • X-WAVE™ – multi-wave illumination

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