AOI for large panel inspection with min line/space down to 40 µm.

Phoenix LT, CIMS latest generation of AOI system, is designed for inspection of large panel of up to 36″ x 42″ (914 mm x 1,067 mm). It is capable to scan down to 40 µm line/space width technology.

The system’s state of the art optical technology Microlight™ provides optimal light coverage in order to be able to meet the most rigorous detection requirements. Optimized performance is achieved by combining superior image quality with customizable detection algorithms.

Equipped with the state-of-the-art image acquisition and advanced software capabilities, the Phoenix product family is renowned for its exceptional detection achieved with lowest possible false calls rate.

Phoenix LT is powered by Spark™ – an innovative cross-platform detection engine.


  • Linear motors for smooth & silent motion
  • Robust mechanical structure
  • Automated vacuum table
  • High performance image processing firmware
  • Powerful processors to handle large data
  • Fast and intuitive setup for new jobs
  • Compatible with front/back AMHS automation or robot
  • Two monitors (one on each side) for convenient operation


  • Fi – final inspection option for finished boards
  • +2DM metrology – panel dimensions measurement
  • +2CD metrology – 2D measurement of circuit elements
  • LDI – laser drill inspection option
  • CDB/CDBIC – defects classification and virtual defects mapping
  • VVS – virtual verification system

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