IC Substrates
IC Substrates inspection solutions
IC Substrates: 4 - 15 micron line/space
Bare Board Inspection
Galaxy 4Cχ
Galaxy 4Cχ, equipped with color camera, is designed to support high volume manufacturing of next generation IC Substrates. It is capable to scan down to 4 µm line/space width technology.
Galaxy 5Cχ
Galaxy 5Cχ, equipped with color camera, is designed to support high volume manufacturing of highly advanced IC Substrates. It is capable to scan down to 5 µm line/space width technology.
Galaxy 7Cχ
Galaxy 7Cχ, equipped with color camera, is designed to support high volume manufacturing of advanced IC Substrates. It is capable to scan down to 7 µm line/space width technology.
Galaxy 10Cχ
Galaxy 10Cχ, equipped with color camera, is designed to support high volume manufacturing of advanced IC Substrates and ultra fine line HDI. It is capable to scan down to 10 µm line/space width technology.
Hybrid Verification Systems
VVR for ICS
VVR, CIMS hybrid-mode verification station that combines virtual and physical verification within a single workstation. VVR for ICS is designed to support high volume manufacturing of IC Substrates and optimized for verification of 4 ~ 15 µm line/space width technology.
AI-powered Hybrid Verification Systems
AIVR 4μ
AIVR, CIMS AI-powered verification station that combines virtual and physical verification within a single workstation. AIVR 4μ is designed to support high volume manufacturing of IC Substrates and optimized for verification of 4 ~ 15 µm line/space width technology.
AIVR 5μ
AIVR, CIMS AI-powered verification station that combines virtual and physical verification within a single workstation. AIVR 5μ is designed to support high volume manufacturing of IC Substrates and optimized for verification of 5 ~ 25 µm line/space width technology.
AIVR 7μ
AIVR, CIMS AI-powered verification station that combines virtual and physical verification within a single workstation. AIVR 7μ is designed to support high volume manufacturing of IC Substrates and optimized for verification of 7 ~ 25 µm line/space width technology.
AIVR 10μ
AIVR, CIMS AI-powered verification station that combines virtual and physical verification within a single workstation. AIVR 10μ is designed to support high volume manufacturing of HDI and IC Substrates and optimized for verification of 10 ~ 25 µm line/space width technology.
Photo-tools inspection
Phoenix PT/Micro
Phoenix PT/Micro, CIMS photo-tools AOI system, is designed to inspect high-resolution film artworks and glass masks. It is capable to scan down to 7 µm line/space width technology.
Phoenix PT+
Phoenix PT+, CIMS photo-tools AOI system, is designed to inspect high-resolution film artworks and glass masks. It is capable to scan down to 12.5 µm line/space width technology.
Flex, Rigid Flex, R2R: 15 micron line/space
Flex and Rigid-Flex PCB Inspection
Galaxy Flex 15μ
Galaxy Flex 15μ is designed to support high volume manufacturing of fine line flex and rigid-flex PCB. It is capable to scan down to 15 µm line/space width technology.
R2R (Roll-to-Roll) PCB Inspection
Galaxy R2R 15μ
Galaxy R2R 15μ is designed to support roll-to-roll (R2R) manufacturing of flex and rigid-flex PCB. It is capable to scan down to 15 µm line/space width technology.
IC Substrates (strips): 4 - 10 micron line/space
IC Substrates Strips Inspection
Capricorn 4Cχ
Capricorn 4Cχ, CIMS latest generation AVI system, equipped with color camera, is designed for final inspection of next generation IC Substrates. It is capable to scan down to 4 µm line/space (1 μm optical pixel size) width technology.
Capricorn 5Cχ
Capricorn 5Cχ, CIMS latest generation AVI system, equipped with color camera, is designed for final inspection of highly advanced IC Substrates. It is capable to scan down to 5 µm line/space (1.6 μm optical pixel size) width technology.
Capricorn 8Cχ
Capricorn 8Cχ, CIMS latest generation AVI system, equipped with color camera, is designed for final inspection of advanced IC Substrates. It is capable to scan down to 8 µm line/space (2.2 μm optical pixel size) width technology.
Verification Systems
SVS 4μ
SVS 4μ, CIMS AVI verification station, powered by Sprint™, is designed for verification of IC Substrates strips scanned with AVI systems. It is optimized for verification of 4 ~ 8 µm line/fingers width technology.
SVS 5μ
SVS 5μ, CIMS AVI verification station, powered by Sprint™, is designed for verification of IC Substrates strips scanned with AVI systems. It is optimized for verification of 5 ~ 8 µm line/fingers width technology.
SVS 8μ
SVS 8μ, CIMS AVI verification station, powered by Sprint™, is designed for verification of IC Substrates strips scanned with AVI systems. It is optimized for verification of 8 ~ 12 µm line/fingers width technology.
IC Substrates (strips): 10 - 15 micron line/space
IC Substrates Strips Inspection
Capricorn 10Cχ
Capricorn 10Cχ, CIMS latest generation AVI system, equipped with color camera, is designed for final inspection of advanced IC Substrates. It is capable to scan down to 10 µm line/space (2.9 μm optical pixel size) width technology.
Capricorn 15Cχ
Capricorn 15Cχ, CIMS latest generation AVI system, equipped with color camera, is designed for final inspection of standard IC Substrates. It is capable to scan down to 15 µm line/space (3.8 μm optical pixel size) width technology.
Verification Systems
SVS 10µ
SVS 10µ, CIMS AVI verification station, powered by Sprint™, is designed for verification of IC Substrates strips scanned with AVI systems. It is optimized for verification of 10 ~ 18 µm line/fingers width technology.
SVS 15µ
SVS 15µ, CIMS AVI verification station, powered by Sprint™, is designed for verification of IC Substrates strips scanned with AVI systems. It is optimized for verification of 15 ~ 25 µm line/fingers width technology.
IC Substrates (panels): 5 - 25 micron line/space
IC Substrates Panel Inspection
Galaxy Fi 5Cχ
Galaxy Fi 5Cχ, is a panel based final inspection system for highly advanced IC Substrates and ultra fine line HDI, equipped with color camera and is designed to scan down to 5 µm line/space width technology.
Galaxy Fi 7Cχ
Galaxy Fi 7Cχ, is a panel based final inspection system for advanced IC Substrates and ultra fine line HDI, equipped with color camera and is designed to scan down to 7 µm line/space width technology.
Galaxy Fi 10Cχ
Galaxy Fi 10Cχ, is a panel based final inspection system for advanced IC Substrates and ultra fine line HDI, equipped with color camera and is designed to scan down to 10 µm line/space width technology.
Verification Systems
CVR 100 Fi
CVR 100 Fi, CIMS verification station, is designed for verification of finished boards of high-end HDI and IC Substrates. It is optimized for verification of 10 ~ 30 µm line/space width technology.
Special Applications
Blind Laser Via Inspection
Galaxy LV series
Galaxy LV series represent the family of models designed to support inspection of blind laser via in high volume manufacturing of advanced HDI or IC Substrates. The systems within this family include the models for via hole sizes of 10, 15, 20 and 25 μm.
Through Laser Via Inspection
Galaxy VIA series
Galaxy VIA series represent the family of models designed to support inspection of through laser via in high volume manufacturing of advanced HDI or IC Substrates. The systems within this family include the models for via hole sizes of 20, 25 and 30 μm.
Mechanical Drill Inspection
Phoenix MDI
Phoenix MDI is designed for inspection of mechanical (through) drills and slots on HDI and multi-layer PCB. It is capable to scan mechanical drills down to 150 µm in diameter.